Releasing argon gas from inside the hollow cathode, ionizing the inert gas and forming a discharge.
The discharge operation gas, argon gas, is released from inside the hollow cathode, ionizing this inert gas to form a discharge. For more details, please contact us or download the catalog.
Inquire About This Product
basic information
**Features** - Expansion of the film formation area through vertical movement of the hearth and rod feed method → Achieves improved uniformity - Improved workability through double-door opening and fixture placement design - Generation of high energy density plasma beam using beam convergence coils **NTH-1000 Device Specifications** - Vacuum chamber (mm): φ1000×800H - Effective area: φ200×400×8 type - Substrate holder: Self-rotating type (bottom placement) - Operating gases: Ar, N2, C2H2 - Evaporation ion source: HCD gun - Achievable pressure: Below 5×10^-6 Torr - Exhaust speed: Within 30 minutes to 5×10^-5 Torr - Substrate heating mechanism: Electron impact heating (optional, sheath heater) - Device operation: Automatic operation - Rough pumping method: Rotary pump - Main pumping method: Turbo molecular pump - Required power: 3φ 200V 150kVA - Required installation area: 5500W×5000D×2500H - Cooling water: 3kgf/cm² 50L/min - Compressed air: 5~6kgf/cm² ● For more details, please contact us or download the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
For more details, please contact us or download the catalog.
catalog（1）
Download All Catalogs
Company information
We established Nanotech Co., Ltd. in 1989, pursuing our dreams in the technologies of "plasma" and "vacuum." Currently, we are developing coating technologies, including DLC (diamond-like carbon), using these technologies. Many of the DLC coating technologies are applied to drills, molds, and machine parts, making them a vital technology that supports the industry behind the scenes. I believe that Japan's status as a "technology-oriented nation" is due to the existence of such remarkable technologies that are not immediately visible, which lead to the creation of high-performance, high-quality products. To meet our customers' needs over the long term, enhancing our internal systems is key, and the ideas and actions of the people working here create a vibrant corporate culture that fosters reliable responses to our customers. We are currently focusing on creating this environment as our top priority.
![Deburring Machine "Twin Baritor" [Eligible for Small and Medium Enterprise Productivity Investment Subsidy]](https://image.mono.ipros.com/public/product/image/6d3/2000308654/IPROS16685940644635288329.png?w=280&h=280)
