Releasing argon gas from inside the hollow cathode, ionizing the inert gas and forming a discharge.
The discharge operation gas, argon gas, is released from inside the hollow cathode, ionizing this inert gas to form a discharge. For more details, please contact us or download the catalog.
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**Features** - Expansion of the film formation area through vertical movement of the hearth and rod feed method → Achieves improved uniformity - Improved workability through double-door opening and fixture placement design - Generation of high energy density plasma beam using beam convergence coils **NTH-1000 Device Specifications** - Vacuum chamber (mm): φ1000×800H - Effective area: φ200×400×8 type - Substrate holder: Self-rotating type (bottom placement) - Operating gases: Ar, N2, C2H2 - Evaporation ion source: HCD gun - Achievable pressure: Below 5×10^-6 Torr - Exhaust speed: Within 30 minutes to 5×10^-5 Torr - Substrate heating mechanism: Electron impact heating (optional, sheath heater) - Device operation: Automatic operation - Rough pumping method: Rotary pump - Main pumping method: Turbo molecular pump - Required power: 3φ 200V 150kVA - Required installation area: 5500W×5000D×2500H - Cooling water: 3kgf/cm² 50L/min - Compressed air: 5~6kgf/cm² ● For more details, please contact us or download the catalog.
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We established Nanotech Co., Ltd. in 1989, pursuing our dreams in the technologies of "plasma" and "vacuum." Currently, we are developing coating technologies, including DLC (diamond-like carbon), using these technologies. Many of the DLC coating technologies are applied to drills, molds, and machine parts, making them a vital technology that supports the industry behind the scenes. I believe that Japan's status as a "technology-oriented nation" is due to the existence of such remarkable technologies that are not immediately visible, which lead to the creation of high-performance, high-quality products. To meet our customers' needs over the long term, enhancing our internal systems is key, and the ideas and actions of the people working here create a vibrant corporate culture that fosters reliable responses to our customers. We are currently focusing on creating this environment as our top priority.