Feedback control of the piezo stage using a maximum of three-axis strain gauge sensors is possible.
By equipping our standard piezo driver M-2629 series with the M-5106 servo unit, feedback control of the piezo stage using up to three-axis strain gauge sensors is possible. Furthermore, by incorporating the capacitive displacement sensor M-2218, feedback control using capacitive displacement sensors is also achieved. It can be mounted on a JIS rack and is compatible with "piezo with built-in strain gauge sensors (from various manufacturers)."
Inquire About This Product
basic information
○Power supply: AC100V 50Hz/60Hz inlet ●For more details, please contact us or download the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
For more details, please refer to the catalog or contact us.
Company information
We are a specialized manufacturer of precision positioning devices using piezo actuators. All of our piezo drivers and piezo stages are developed in-house. We are confident that the products developed by our engineers, who are well-versed in piezo technology, will be of great help to you. If you are facing any issues with precision positioning systems, please do not hesitate to contact Mestec.