Operates at extremely low temperatures and low vacuum levels that are not found in hot cathodes!
We have combined the ion gun technology and know-how of Omegatron to complete a simple and highly reliable cold cathode ion gun. Despite using expensive rare metals for the discharge electrodes, we were able to reduce the number of parts through optimal design, allowing us to offer a selling price of 1,230,000 yen (excluding tax) while improving quality. Additionally, if you choose optional units, it is possible to reasonably step up to a high-functionality and high-performance type as before. If you select the coaxial neutralizer equipped in the neutral beam gun as an option, it will demonstrate its power in the precise milling of insulators such as ceramics. Its very simple structure ensures excellent reliability and maintainability, minimizing the effort required from our customers.
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basic information
Ionization method: Cold cathode type Ion energy: 1 keV to 5 keV Ion current: 3 μA to 38 μA/Ar+/WD=150 mm Beam diameter: φ15 mm Operating vacuum level: 5.0 x 10^-4 Pa to 2.0 x 10^-3 Pa (Within our chamber)
Price information
Domestic direct sales price
Price range
P5
Delivery Time
P4
※The delivery time may vary depending on the purchase period, so please feel free to contact us.
Applications/Examples of results
Sample cleaning Irradiation test Ion beam sputtering The technology of the ion gun used for precision removal processing in micro areas of EUV mirrors for semiconductor exposure equipment has been fed back into this product.
Company information
Our company's sales policy is based on the following three pillars: - Contributing to the realization of researchers' "dreams" and "thoughts" through assistance in advanced and unique fundamental research. - Providing and maintaining high-performance vacuum experimental equipment, primarily consisting of high-performance electron guns and high-performance ion guns, tailored to meet our customers' needs, thereby contributing to research and development. - Applying these fundamental technologies to develop original products from OmegaTron, contributing to a wide range of industries and research and development sectors.