オメガトロン Product Lineup

The "OMI-0015CKE" is a simple and highly reliable cold cathode ion gun. The "Type A," which enhances convergence, is equipped with two stages of beam convergence lenses. Meanwhile, the broad beam type "Type B" uses a single stage of convergence lens to keep costs down while still being able to emit a high current ion beam. Both models utilize electromagnets with low leakage magnetic flux and excellent discharge control characteristics. 【Features】 ■ Simple ■ Highly reliable ■ Two stages of beam convergence lenses (Type A) ■ Capable of emitting a high current ion beam while keeping costs down (Type B) ■ Uses electromagnets with low leakage magnetic flux and excellent discharge control characteristics *For more details, please refer to the PDF document or feel free to contact us.

• Other physicochemical equipment

The "OMS-1940" features 80% newly designed components from the previous model and is a low-speed mass-selective ion beam irradiation system capable of irradiating various ions with relatively high currents, particularly in the ultra-low speed range of a few eV to 100 eV. The ion source section utilizes an assembly-type ceramic discharge tube, providing excellent maintainability, corrosion resistance, and stability, making it effective for long-duration experiments. Additionally, it can stably discharge not only Ar, oxygen, nitrogen, hydrogen, and He but also BCl3 gas, allowing for the generation of various ions through the exchange of ion source components and gas introduction systems. 【Features】 - Capable of irradiating various ions with relatively high currents - Ion source section uses an assembly-type ceramic discharge tube - Mass separation with a resolution of 1 amu is possible by exchanging the orifice - Effective design for reducing neutrals and electrons - Good beam convergence and high efficiency even in the ultra-low speed range *For more details, please refer to the PDF document or feel free to contact us.

• Other physicochemical equipment

The "OMI-0850 series" is an RF-excited ion gun that enables ultra-precision machining on the nanometer order. It can stably irradiate a high-current ion beam for extended periods, thereby reducing the processing time for precision components. An optional unique neutralizer can be equipped, allowing for the processing of insulators as well. In addition to Ion Beam Figuring (IBF), the finely focused beam can also be used for IBS ion beam sputter deposition. 【Features】 ■ Capable of ultra-precision machining on the nanometer order ■ RF excitation method ■ Compatible with IBS ion beam sputter deposition ■ Optional unique neutralizer available ■ Can process insulators *For more details, please refer to the PDF materials or feel free to contact us.

• Other physicochemical equipment

The "OMS-5010ESi" is an ion beam irradiation system equipped with a newly developed cold cathode ion gun, an ExB separator, a beam transport system, and a high-performance lens system, capable of irradiating various ion beams with high voltage and high current up to 10kV. It can discharge not only Ar, He, and hydrogen but also nitrogen, oxygen, and CO2 gases. The ion source section uses rare metals, achieving excellent maintainability and stability, making it effective for long-duration experiments. 【Features】 - ExB separator type - Capable of irradiating various ion beams with high voltage and high current up to 10kV - Mass separation with a resolution of 1 amu is possible by exchanging the orifice - High efficiency due to the multi-stage arranged converging lenses - Can discharge not only Ar, He, and hydrogen but also nitrogen, oxygen, and CO2 gases *For more details, please refer to the PDF document or feel free to contact us.

• Other physicochemical equipment

The OME-0035 is a low-speed electron gun with a beam energy range of 10 eV to 1100 eV. Even at a low beam energy of 10 eV, it can emit a high current of nearly 200 nA. It is suitable for applications such as neutralizing surface charging, ionizing gases, and secondary electron emission testing. Additionally, by connecting a pulse amplifier (optional) to the external input terminal, pulse generation becomes possible, allowing for ionization for TOF and precise charging tests. 【Features】 ■ Beam energy: 10 eV to 1100 eV ■ Pulse generation is possible by connecting a pulse amplifier to the external input terminal *For more details, please refer to the PDF documentation or feel free to contact us.

• Other physicochemical equipment

This is a compact high-power plasma source that can be used with the ICF70 mount. The plasma source features a simple design, and the controller, which is resistant to abnormal discharges and pulse shocks, has been cleverly designed with a wide output band, achieving ease of maintenance for users and high cost performance.

• Plasma Generator

The "OMS-0070FC" is a Faraday cup measurement system for measuring the total current of ion beams and electron beams, with an aperture diameter of φ20mm. By switching the current measurement resistance, it can measure from 0.01μA (minimum sensitivity) to 10.000mA. For more details, please contact us. 【Specifications】 ■Material: SUS, aluminum, copper, alumina ■Aperture diameter: φ20mm ■Maximum input power: 120W (averaged incident on φ20mm) ■Mounting flange: ICF70 ■Vacuum side size: φ34mm×100mm *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

This product is a decelerated cold cathode ion gun that can be used in ultra-high vacuum with beam energy ranging from 10 eV to 3000 eV. It efficiently extracts ions and, with a high-precision decelerated multi-stage lens, can irradiate a low-speed ion beam with high current density. The filament-free structure allows for the use of reactive gases and enables shorter maintenance cycles due to its long lifespan. It features a newly designed discharge chamber that excels in maintainability. Additionally, the high-efficiency differential exhaust design keeps the main chamber at ultra-high vacuum levels. 【Features】 - Decelerated cold cathode ion gun - Capable of irradiating low-speed ion beams with high current density - Filament-free structure allows for the use of reactive gases - Enables shorter maintenance cycles due to long lifespan - Newly designed discharge chamber with excellent maintainability *For more details, please refer to the PDF document or feel free to contact us.

• Plasma surface treatment equipment

We have combined the ion gun technology and know-how of Omegatron to complete a simple and highly reliable cold cathode ion gun. Despite using expensive rare metals for the discharge electrodes, we were able to reduce the number of parts through optimal design, allowing us to offer a selling price of 1,230,000 yen (excluding tax) while improving quality. Additionally, if you choose optional units, it is possible to reasonably step up to a high-functionality and high-performance type as before. If you select the coaxial neutralizer equipped in the neutral beam gun as an option, it will demonstrate its power in the precise milling of insulators such as ceramics. Its very simple structure ensures excellent reliability and maintainability, minimizing the effort required from our customers.

• Plasma surface treatment equipment