A stage that achieves high resolution, high reproducibility, and high retention with linear scale feedback! Stroke in the order of hundreds of mm!
Comprehensive catalog of high-resolution positioning devices for atmospheric use and vacuum-compatible high-resolution positioning devices (feedback stage systems) designed, manufactured, and sold by Sigma Tech. It covers specifications, configurations, prices, and options for feedback stages, feedback stage controllers, and cables. Please feel free to consult us about anything related to positioning. ■ Features and Description of Atmospheric Systems We develop, manufacture, and sell compact positioning devices equipped with linear scales. We have been achieving nano positioning since before the term nanotechnology was coined. Based on that know-how, we respond to our customers' needs. ■ Features and Description of Vacuum-Compatible Systems Since our founding, we have gained know-how in vacuum compatibility through custom solutions, providing high resolution and high precision reproducibility for vacuum applications. For more details, please download the catalog or contact us.
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basic information
◆Atmospheric Positioning Device This positioning device achieves high resolution, high repeatability, and high position holding capability through a feedback stage equipped with our self-developed optical linear scale and a feedback stage controller with unique feedback control functionality. ◆Vacuum-Compatible System By combining a feedback stage with an integrated optical linear scale and a feedback stage controller equipped with our proprietary control circuit, we have realized a full closed-loop feedback function within a vacuum.
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Applications/Examples of results
Research, development, and inspection requiring precise positioning Research applications in the optical field Sample stage of semiconductor lithography equipment Microscope stage
Detailed information
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10nm feedback stage system Operates with 10nm resolution against the built-in scale Positioning device Stroke ranges from 20 to 150mm
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Feedback stage Feedback stage with built-in scale You can choose from various shapes and strokes.
Line up（9）
| Model number | overview |
|---|---|
| FC-901U | Controller for 1nm resolution stage Motor driver and feedback circuit built-in |
| FC-601A | Controller for 5nm resolution stage Motor driver and feedback circuit built-in |
| FC-501A | Controller for 10nm resolution stage Motor driver and feedback circuit built-in |
| FC-401 | Controller for 50nm resolution stage Motor driver and feedback circuit built-in |
| FC-101 | Controller for 100nm resolution stage Motor driver and feedback circuit built-in |
| FS-1020UPX | 20mm stroke, 1nm resolution (built-in scale reading) operation |
| FS-1020SPX | 20mm stroke, 5nm resolution (built-in scale reading) operation |
| FS-1020PX | 20mm stroke, 10nm resolution (built-in scale reading) operation |
| FS-1020X | 20mm stroke, 100nm or 50nm resolution (built-in scale reading) operation |
catalog（2）
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.