Positioning with 5nm resolution! Excellent reproducibility and a movable distance in the millimeter range.
■High Resolution and Reproducibility The built-in motor driver in the controller allows the stage to operate with a resolution of 5nm, and the position is read by an optical linear encoder integrated into the stage, enabling high resolution and excellent reproducibility through feedback control. ■Long Stroke Due to the ball screw drive, a maximum movement of 50mm is possible. This allows for precise positioning and sample retraction with a single stage. ■Control The controller is equipped with several communication interfaces, allowing the stage to be controlled by inputting command strings from a PC or similar device.
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basic information
■Stage Minimum resolution: 5nm (relative to the reading value of the built-in scale) Stroke: 20mm to 50mm Maximum movement speed: 5mm/sec ■Controller Number of control axes: 2 Minimum command unit: 5nm Maximum operating speed setting: 30mm/sec (the maximum movement speed of the stage takes priority) Control interface: Jog controller, emergency stop input, GP-IB, USB, Ethernet, general-purpose I/O
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Applications/Examples of results
Various fields requiring fine positioning. Applications in inspection equipment, exposure equipment, and laser processing equipment, as well as stages for microscopes that require high reproducibility in the bio-related field.
Line up（4）
| Model number | overview |
|---|---|
| FS-1020SPX | 5nm resolution (internal scale reading value), stage with 20mm stroke |
| FS-1040SPX | 5nm resolution (internal scale reading value), stage with 40mm stroke |
| FS-1050SPX | 5nm resolution (internal scale reading value), stage with 50mm stroke |
| FC-611 | Controller for 5nm resolution stage |
catalog（5）
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
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