Positioning with 10nm resolution! Excellent reproducibility, stage with a stroke of 20 to 200mm.
■High Resolution and Reproducibility The built-in motor driver in the controller allows the stage to operate with a resolution of 10nm, and the optical linear encoder integrated into the stage reads the position for feedback control, resulting in high resolution and excellent reproducibility. ■Long Stroke It can move up to 200mm. This enables precise positioning and sample retraction with a single stage. ■Control The controller is equipped with several communication interfaces, allowing the stage to be controlled by inputting command strings from a PC or similar device. ■Movable Type In addition to linear motion, we also offer lifting types and micro-rotation options. For more details, please download the catalog or contact us.
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basic information
■Stage Minimum resolution: 10nm (relative to the reading value of the built-in scale) Stroke: 20mm to 200mm Maximum movement speed: 20mm/sec (varies depending on stroke and movable type) ■Controller Number of control axes: 2 Minimum command unit: 10nm Maximum operating speed setting: 50mm/sec (the stage's maximum movement speed takes priority) Control interface: Jog controller, emergency stop input, GP-IB, USB, Ethernet, general-purpose I/O
Price range
Delivery Time
Applications/Examples of results
Various fields requiring fine positioning. Inspection equipment and exposure equipment. Applications in laser processing equipment. Adjustment of optical systems. Stages for microscopes requiring high reproducibility in the bio-related field, etc.
Line up（10）
| Model number | overview |
|---|---|
| FS-1020PX | 10nm resolution (internal scale reading), stage with 20mm stroke |
| FS-1040PX | 10nm resolution (internal scale reading), stage with 40mm stroke |
| FS-1050PX | 10nm resolution (internal scale reading), stage with 50mm stroke |
| FS-1100PX | 10nm resolution (internal scale reading), stage with 100mm stroke |
| FS-3150PX | 10nm resolution (internal scale reading), stage with 150mm stroke |
| FS-1005PZ | 10nm resolution (internal scale reading), lift type stage with 5mm stroke |
| FS-1010PZ | 10nm resolution (internal scale reading), lift type stage with 10mm stroke |
| FC-511 | Controller for 10nm resolution stage |
| FS-3200PX | 10nm resolution (internal scale reading), stage with 200mm stroke |
| FC-514 | Controller for 10nm resolution stage, compatible with slowdown sensor and origin sensor inputs |
catalog（5）
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
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