Achieved square holes without R, which was "impossible" with conventional processing technology. Also capable of small diameters and narrow pitches.
Multiple through holes of 0.2mm square were processed into 0.5t Pyrex glass, creating a mesh-like structure. This processing technology was developed for mass production and can accommodate various quantities. 【Features】 ○ Numerous through holes processed at 0.1mm × 0.1mm ・ (Example) 150,000 holes on a 3-inch wafer ○ Selection of through hole shapes possible with a high aspect ratio (1:8 to 10) ・ Supports straight and tapered shapes ○ Achieves chip-on-glass ・ Improved contact performance during anodic bonding with Si *For more details, please download the catalog or contact us.
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【Options】 ● Metallization on side wall surfaces is possible ・Prevents interference and absorption of light ● Cavity shapes are also possible *For more details, please download the catalog or contact us.
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Image 1 Achieving square holes without R, which was "impossible" with conventional processing technology. Small diameters and narrow pitches are also possible.
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Achieved square holes without R, which was "impossible" with conventional processing technology. Small diameters and narrow pitches are also possible.
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We will propose the most suitable solutions that match our customers' requirements, considering quality, cost, and mass production, through our advanced composite processing technology (Cross Edge Micro Machining), which combines five cutting-edge techniques: cutting, grinding, polishing, metalizing, and joining.