Minimizing backlash to achieve high-precision gas control with reproducibility.
The high-performance variable leak valve ZLVM series is used to control minute gas flows when introducing gas from a gas source into a vacuum chamber. By minimizing backlash and innovating the material and structure of the knife edge and copper alloy pad, we have achieved reproducible and highly precise gas control. For more details, please contact us.
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【Main Features】 ○ Controls a small gas flow when introducing gas from the gas source into the vacuum chamber. ○ Achieves highly precise gas control with reproducibility. → By minimizing backlash and innovating the material and structure of the knife edge and copper alloy pad, highly precise gas control with reproducibility is achieved. ○ Adjustment range: 1×10^4 to 1×10^9 Pa ○ Flange: ICF34 rotating or fixed, ICF70 rotating or fixed ● For more details, please contact us.
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