Fully metal construction allows baking up to 450°C! Gas flow can be adjusted over a wide range.
The "Ultra High Vacuum Variable Leak Valve" is a product used in vacuum devices that require adjustment of the introduced gas flow rate. It allows for gas introduction from an extremely low flow rate region, with an adjustable minimum leak rate of 6.7×10^-9 Pa·m³/sec or less. Additionally, it is made entirely of metal and can withstand baking up to 450°C, making it suitable for ultra high vacuum devices. 【Features】 ■ Seal section resistant to heat and external shocks ■ Stable adjustment of minute gas flow rates ■ Excellent heat tolerance ■ Capable of adjusting a wide range of gas flow rates ■ Compatible with ultra high vacuum connections *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications (Excerpt)】 ■ Operating vacuum range: Approximately atmospheric pressure to 10^-8 Pa ■ Adjustable minimum leak rate: Below 6.7×10^-9 Pa·m³/sec ■ Leak rate when valve is fully closed: Below 6.7×10^-11 Pa·m³/sec ■ Allowable heating temperature: 450℃ (can be opened and closed) ■ Gasket lifespan ・Approximately 300 seals (at room temperature) ・Approximately 30 seals (when baking is involved) (gasket is replaceable) *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Vacuum devices that require adjustment of the introduced gas flow rate ■ Sputtering devices, gas analysis devices ■ Equipment for physics experiments and research, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.
