Non-contact monitoring of epiwafer resistivity is possible!
The QC2500 series can monitor the resistivity of epitaxial wafers non-contactly. Using the surface photovoltage (SPV) method as the measurement principle, it detects changes in the surface potential of the wafer by irradiating it with pulsed light and measures the width of the depletion layer. Since the width of the depletion layer in a strong inversion state is proportional to the impurity concentration, it performs impurity concentration measurements and converts them to resistivity (ASTM).
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basic information
■Features ■Non-destructive, non-contact measurement monitor ・No monitor wafer required ■Built-in wafer surface treatment device ・Surface treatment before measurement possible with UV + corona charge and ROST ■High throughput ・Measurement speed / 1 point 0.1 seconds
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Applications/Examples of results
It is possible to monitor the resistivity of epitaxial wafers non-contactly.
Line up（1）
| Model number | overview |
|---|---|
| QCS2500 |
Company information
Semilab is a comprehensive measurement device manufacturer that supports research and manufacturing of cutting-edge technologies worldwide. We handle non-contact CV measurement devices, lifetime measurement devices, spectroscopic ellipsometers, photoluminescence, DLTS systems, sheet resistance measurement devices, nanoindenters, AFM, and more for the inspection of semiconductor wafers and devices. Please feel free to contact us for specifications and pricing of our devices.