For applications in the semiconductor industry and high-purity gases. Long-term leak-tightness guaranteed by patented metal/metal sealing mechanism!
Introducing the metal seal digital mass flow/pressure meter/controller. The equipment features a high-quality surface finish and a modular concept structure, ensuring long-term leak tightness. This unit is equipped with a PC board that offers high precision, excellent temperature characteristics, and fast response. The latest EL-FLOW series also includes multi-gas/multi-range functionality, providing optimal flexibility and process efficiency for (OEM) customers in their applications. For more details, please download and view the catalog.
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basic information
【Features】 ● Long-term leak tightness guarantee (against atmosphere) due to patented metal/metal seal mechanism ● Electric polished gas contact parts ● High response and high repeatability ● Flow range: 0.1...5 sccm to 0.6...100 slm N2 based (high flow available upon request) ● Multi-gas/multi-range functionality ● Low pressure loss, or vacuum application possible (optional) ● Pressure meter/controller range: 0.1...5 to 18...900 psi ● Surface mountable (optional) ● RoHS compliant ◎ You can view detailed specifications and more by downloading the catalog. If you are interested, please download and check the catalog.
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Company information
Since 1981, Bronkhorst High-Tech B.V. has continued to provide a wide range of products in the field of thermal and Coriolis mass flow meters/controllers. Numerous types of standard or customized measuring instruments are available for use in R&D fields, various industrial sectors, or applications in hazardous locations.
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