THK Precision Stage High Response XY Stage EX

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last updated：Mar 16, 2016

トークシステム

The inertial forces on the X and Y axes have been suppressed, enabling excellent high-speed responsiveness!

The Precision Stage High Response XY Stage EX is a simple XY stage that employs a cross LM guide CSR type and does not use a saddle structure. By adopting a special structure that fixes the two-axis motors, the weight of the moving parts has been minimized to the extreme, reducing the inertial forces of each XY axis and enabling excellent high-speed responsiveness. For more details, please contact us.

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**Features** ○ Simple XY Structure → This is a simple XY stage that uses a cross LM guide CSR in the guide frame, eliminating the need for a saddle like traditional XY stages. ○ Excellent Responsiveness → The structure using the cross LM guide CSR removes the intermediate saddle and adopts a special structure that also fixes both axes' motors. This allows for extreme weight reduction of the moving parts, minimizing the inertia forces of each axis and achieving excellent high-speed responsiveness. ○ High-Rigidity XY Stage → By using a cross LM guide CSR with four-directional equal load in the XY guide frame, the radial rigidity is higher compared to stages using cross roller guides. ○ Play-Free Coupling Mechanism → The drive unit of the X-axis integrates linear motion guidance LM guides and drive ball screws, adopting a space-saving, high-rigidity, and high-precision KR. The connection with the top table is structured to provide appropriate preloading with LM guide HSR, ensuring a play-free design. ● For more details, please contact us.