It is a high-precision XYZ auto stage.
Automatically inspects chip element defects on wafers. The system controls a microscope color camera and auto stage to automatically identify defects at the chip element level. For more details, please download and view the catalog.
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basic information
【Features】 1. High-precision XYZ auto stage 2. Coordinate management: absolute/relative coordinate control for pattern placement drive 3. Displays defect locations on the element map. 4. Defect identification: comparison with registered standard images, with the ability to set overlaps in five locations within the chip. 5. Alignment function ◎ You can view detailed specifications and more by downloading the catalog. If you are interested, please download the catalog to take a look.
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We will collaboratively think about and manufacture prototypes, automatic machines, and online machines for inspection equipment that supports the manufacturing and development of new technologies, tailored to your ideas and requests. We provide everything from the design and manufacturing maintenance of hardware, optical systems, and software for ordered products to after-sales service.