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  3. Measurement and Analysis
  4. Microscopes
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  6. MEMS wafer chip inspection machine

MEMS wafer chip inspection machine

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last updated:May 29, 2012

アイティ・テック
アイティ・テック
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High-precision cleanroom-compatible auto-review microscope

This is an autofocus microscope that inspects fine chip defects on MEMS wafers. The autofocus microscope is mounted on the XYZ electric body. By placing the wafer and controlling the XYZ stage with software, it can inspect the device chip on the wafer and input focused images of defect locations at the optimal magnification for inspection. For more details, please download and view the catalog.

    Other inspection equipment and devicesOther microscopes
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MEMS wafer chip inspection machine

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  • Related Link - http://www.ittec.co.jp/filename63.html

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【Features】 1. This is a high-precision auto-review microscope suitable for clean rooms. 2. The LSAF does not discriminate between samples, from the mirror surface to the black surface and from the patterned surface to plain glass. 3. With an electric revolver, it can perform auto-focus image inspection on all objective lenses ranging from 2x to 100x. ◎ You can view detailed specifications and more by downloading the catalog. If you are interested, please download and check the catalog.

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MEMS wafer chip inspection machine

MEMS wafer chip inspection machine

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We will collaboratively think about and manufacture prototypes, automatic machines, and online machines for inspection equipment that supports the manufacturing and development of new technologies, tailored to your ideas and requests. We provide everything from the design and manufacturing maintenance of hardware, optical systems, and software for ordered products to after-sales service.

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