Equipment that supplies various gases, including special materials gases for semiconductors, while considering maintainability and other factors.
The high airtight "Gas Supply Unit" is a device that supplies various gases, including special materials gases for semiconductors. It is designed with consideration for various factors such as supply piping for different gases, automatic supply, airtightness, cleanliness, safety, and maintainability, starting with the cylinder box. It ensures high safety during handling and maintains sufficient cleanliness. The supply piping maintains high airtightness, and options tailored to customers, such as gas leak detectors, are available. For more details, please download the catalog.
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【Features】 ○ High safety during handling ○ Maintains sufficient cleanliness ○ Maintains high airtightness of supply piping ○ Options tailored to customers, such as gas leak detectors ○ Consideration of various factors including supply piping for different gases, automatic supply, airtightness, cleanliness, safety, and maintainability ● For more details, please contact us or download the catalog.
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