Cleaner vacuum, more advanced vacuum control, and a wider range of vacuum pressure areas.
Essential "Ultra-High Vacuum" "Ultra-high vacuum" is indispensable in semiconductor manufacturing processes and plays a crucial role in fundamental research related to new materials and elementary particles. Achieving cleaner vacuum, more advanced vacuum control, and a broader range of vacuum pressure areas will lead to greater outcomes in cutting-edge science and technology. High Pumping Speed and Clean Vacuum Quality We have launched a cryopump unit developed from our extensive air conditioning technology, featuring a unique helium compressor and a Sorbey cycle refrigeration method. With high pumping speed, clean vacuum quality, and above all, its reliability and perfected functionality, it has been highly regarded in various fields. In response to the demand for increased productivity and efficiency, we have expanded our lineup, and the increasingly comprehensive Marathon CP series is categorized by series. Here, vacuum quality speaks for itself.
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basic information
Features Clean ultra-high vacuum without back diffusion The cryopump operates without oil in the exhaust system, eliminating the risk of back diffusion. The oil used in the roughing pump before startup can also be set to a high crossover pressure, ensuring no concerns about back diffusion and achieving a clean vacuum essential for advanced industries. Improved productivity with speedy exhaust The achievable pressure is determined by the exhaust speed of water vapor. The cryopump has a particularly high exhaust speed for water vapor, contributing to increased productivity through rapid vacuum evacuation. Versatile support for all gases By combining condensation at extremely low temperatures and low-temperature adsorption with activated carbon, it can quickly evacuate all gases. (Measures are necessary for toxic and hazardous gases.) Flexible installation in any orientation There are no restrictions on installation direction, allowing for flexible mounting that accommodates surrounding conditions and design philosophies.
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Applications/Examples of results
Application fields in semiconductor manufacturing: Sputtering equipment / Ion implantation equipment / Deposition equipment / Etching equipment / CVD, etc. Application fields in material properties and physics research: Accelerators / Fusion devices / Electron microscopes / Molecular beam epitaxy equipment (MBE) / Space chambers / Surface analysis equipment / Ion beam measurement equipment
Line up（11）
| Model number | overview |
|---|---|
| MARATHON CP-8 CRYOPUMP | You can choose the mounting flange from ANSI 6", ISO 200, or CF 10". An optional system with automatic regeneration control is available. With one HC-8E4 or F-70 compressor, you can operate up to two cryopumps. |
| MARATHON CP-8LP CRYOPUMP | You can choose the mounting flange from ANSI 6", ISO 200, or CF 10". An optional system with automatic regeneration control is available. With one HC-8E4 or F-70 compressor, you can operate up to two cryopumps. |
| MARATHON CP-250LP CRYOPUMP | An optional system with automatic regeneration control is available. With one HC-8E4 or F-70 compressor, you can operate up to two cryopumps. |
| MARATHON CP-12 CRYOPUMP | You can choose the mounting flange from ANSI 10", ISO 320, or CF 14". An optional system with automatic regeneration control is available. |
| MARATHON CP-16 CRYOPUMP | You can choose the mounting flange from ISO 400, CVC 10", or wire seal flange. An optional system with automatic regeneration control is available. |
| MARATHON CP-20 CRYOPUMP | You can choose the mounting flange from ISO 500, ANSI 20", or wire seal flange. An optional system with automatic regeneration control is available. |
| Zephyr Air-Cooled Compressor | |
| HC-4E1 Water-Cooled Compressor | |
| HC-8E4 Water-Cooled Compressor | |
| F-70L/H Water-Cooled Compressor | |
| CSW-61C/D Water-Cooled Compressor |
Company information
Nagase Techno Engineering Co., Ltd. (abbreviated as NTE) was established in 1983 as a machinery service company of Nagase & Co., Ltd. and changed its name to the current one in 2009. It is the core company for equipment development and maintenance services within the Nagase Group and is expanding its business globally. Our company operates three main businesses: the sale and maintenance of low-temperature and vacuum-related equipment used in the semiconductor and medical fields, a Chemical Management System (CMS) for the recycling of chemicals used in the manufacturing of semiconductors and LCD panels, and a surface defect inspection device (SCANTEC) for inspecting optical and functional films and sheets. We aim to strengthen our global engineering services by leveraging the Nagase Group's network that spans overseas. Additionally, as a new challenge, we will utilize our high engineering capabilities in the agricultural sector to benefit customers outside of domestic manufacturing.