Large chamber, 22-inch cryopump for optical devices.
Large chamber, 22-inch cryopump for optical devices.
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【Features】 ○Significantly reduces initial and running costs ○Class-leading exhaust speed ○Extends maintenance interval to 16,000 hours ○Variations available according to application, such as rapid regeneration ●For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC provides "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services for flat panel displays, electronic components, semiconductors, and general industrial equipment, by bringing together the unique technologies cultivated through years of research and development and production technology reform. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to become a top manufacturer in all cutting-edge fields.