Small type with an intake diameter of 8 to 12 inches! Achieved safe high-speed regeneration without a heater.
The POWER series product is a high-performance cryopump that enhances practical exhaust performance and temperature stability during multi-operation. The average value of vibration acceleration is less than about one-tenth compared to conventional models (our comparison). Even if only one pump is regenerated during multi-operation, the startup time does not become excessively long, minimizing changes in startup time due to operating conditions. 【Features】 ■ Achieves safe, heater-less high-speed regeneration ■ Excellent practical startup characteristics and temperature stability ■ Low vibration ■ Maintains good exhaust performance up to the limit of argon exhaust capacity ■ Significantly increases refrigeration capacity, sustaining stable hydrogen exhaust performance for extended periods *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Other Features】 ■ No worries about sparks, discharges, or leakage since no heater is used. ■ Significantly improved resistance to unbalanced thermal loads entering multi-operation pumps. ■ Capable of more stable operation that is resistant to thermal loads. ■ Triple operation is possible even with a 12-inch cryopump. *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■ Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment) ■ Electronic component manufacturing equipment ■ Vacuum deposition equipment ■ Vacuum furnaces, space chambers ■ Accelerators ■ Various high vacuum equipment *For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.
