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  5. Vacuum Equipment
  6. Crystal Ion Gauge "M-336MX"

Crystal Ion Gauge "M-336MX"

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last updated:Jan 23, 2023

キヤノンアネルバ 栗木本社
キヤノンアネルバ 栗木本社
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Excellent reproducibility in high precision, low vacuum areas! This single device measures a wide pressure range from atmospheric pressure to ultra-high vacuum.

The "M-336MX" is a combination gauge that features a crystal gauge with excellent reproducibility and responsiveness for low vacuum measurements, and a miniature B-A gauge with a long track record for high vacuum measurements. It can measure a wide pressure range from atmospheric pressure to ultra-high vacuum with this one device. It can be used for rough pumping and final pressure measurements of vacuum systems, as well as pressure measurements in semiconductor and electronic component manufacturing equipment. 【Features】 ■ Combination gauge that combines a crystal gauge and a miniature B-A gauge ■ From ultra-high vacuum to atmospheric pressure ■ High precision and excellent reproducibility in low vacuum regions *For more details, please refer to the PDF document or feel free to contact us.

    Vacuum Equipment
2000605006.JPG

Crystal Ion Gauge "M-336MX"

2000605006.JPG
2000605006.JPG
  • Related Link - https://anelva.canon/business/component/vac_detail…

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【Specifications (Excerpt)】 ■ Input Voltage: DC +20 to 28V ■ Power Consumption: 12W ■ Set Point: 2 Contact Outputs ■ Input/Output Connector: D-sub 9-pin ■ Maximum Cable Length: 300m (1mm²) ■ Operating Temperature Range: 5 to 50℃ ■ Storage Temperature Range: -20 to 70℃ (non-operating) ■ Sensor Model Name: MX-1 ■ Dimensions (mm): 149×70×50 (NW25) ■ Flange Shape: NW16, NW25, NW40, φ70 ICF *For more details, please refer to the PDF document or feel free to contact us.

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[Application] ■ Rough pumping and ultimate pressure measurement of vacuum devices, pressure measurement in semiconductor and electronic component manufacturing equipment, etc. *For more details, please refer to the PDF document or feel free to contact us.

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キヤノンアネルバ

キヤノンアネルバ 栗木本社

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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.

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