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  5. Vacuum pump
  6. Ion pump/noble pump control device "P-500"

Ion pump/noble pump control device "P-500"

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last updated:Jan 24, 2023

キヤノンアネルバ 栗木本社
キヤノンアネルバ 栗木本社
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Improved visibility and functionality with the new design! Suitable for automation equipment and remote control devices.

The "P-500" is a control device for operating ion pumps or noble pumps in high vacuum conditions ranging from 10^-2 Pa to 10^-4 Pa or lower. It features large green LEDs for improved visibility from a distance. While considering compatibility with conventional models, it achieves enhanced functionality and compliance with CE and RoHS standards. In addition to its comprehensive I/O functions, it is suitable for automation equipment and remote operation devices, with the possibility of supporting RS232C communication through optional board additions. 【Features】 ■ High performance ■ Comprehensive functionality ■ High compatibility ■ Communication support ■ Compliance standards: CE marking, RoHS directive compliance *For more details, please refer to the PDF materials or feel free to contact us.

    Vacuum pumpOther process controls
2022-03-08_10h38_20.png

Ion pump/noble pump control device "P-500"

2022-03-08_10h38_20.png
2022-03-08_10h38_20.png
  • Related Link - https://anelva.canon/business/component/pu_detail2…

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basic information

【Other Features】 - Improvement of the minimum display values for current and voltage monitoring, addition of pressure display, and various protection functions, achieving the basic functions required for high-voltage power supplies at a high level, compatible with hard processes. - Standard equipped with two set points and various I/O for external control, automatic recovery from power failure (optional). - Ensures compatibility with conventional models for remote connectors, input cables, and output cables. - RS232C (optional/factory-installed). *For more details, please refer to the PDF document or feel free to contact us.

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Applications/Examples of results

【Applications】 ■ Electron microscopes, electron beam lithography systems ■ Ion beam systems, mask repair systems ■ Accelerator-related systems such as storage rings and beamlines ■ Ultra-high vacuum systems such as MBE and surface analysis devices, various analytical instruments, etc. *For more details, please refer to the PDF document or feel free to contact us.

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Ion Pump/Noble Pump Control Device "P-500"

Ion Pump/Noble Pump Control Device "P-500"

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キヤノンアネルバ

キヤノンアネルバ 栗木本社

Machine elements and parts

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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.

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