Technology for developing management methods considering the properties of pharmaceutical solutions and purification techniques for pharmaceutical solutions.
Achieve a reduction in the use of chemical substances and wastewater, as well as energy and resource conservation.
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basic information
Achieving a reduction in waste liquid volume and energy/resource conservation. By managing and operating chemical solutions (Chemical Management System), we are stabilizing the device manufacturing process while reducing the amount of chemicals used and waste liquid generated, as well as achieving energy/resource conservation.
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Applications/Examples of results
Management and operation of chemicals used in device manufacturing through the photolithography process in the semiconductor and liquid crystal panel industry.
Line up（7）
| Model number | overview |
|---|---|
| DDS-21(S) Developer Solution Dilution Supply Device | Ensures stability of developer solution quality |
| DDS-11 Developer Solution Concentration Management Device | Automatically manages the concentrations of two components of the developer solution in real-time |
| DMS-II Developer Solution Recovery and Regeneration Device | Regenerates and supplies the component concentration of the developer solution consistently |
| DDS-32S Developer Solution Dilution and Concentration Management Device | Integrates dilution of the developer solution and concentration management functions |
| DPF Developer Solution Precision Filtration Device | Further improves regeneration efficiency of the developer solution and stabilizes the quality of regenerated developer solution |
| RMS Stripping Solution Concentration Management Device | Extends the liquid life of the stripping solution and reduces usage and disposal amounts |
| SMR Thinner Regeneration Device | Enables safe on-site regeneration of thinner (organic solvent) |
Company information
Nagase Techno Engineering Co., Ltd. (abbreviated as NTE) was established in 1983 as a machinery service company of Nagase & Co., Ltd. and changed its name to the current one in 2009. It is the core company for equipment development and maintenance services within the Nagase Group and is expanding its business globally. Our company operates three main businesses: the sale and maintenance of low-temperature and vacuum-related equipment used in the semiconductor and medical fields, a Chemical Management System (CMS) for the recycling of chemicals used in the manufacturing of semiconductors and LCD panels, and a surface defect inspection device (SCANTEC) for inspecting optical and functional films and sheets. We aim to strengthen our global engineering services by leveraging the Nagase Group's network that spans overseas. Additionally, as a new challenge, we will utilize our high engineering capabilities in the agricultural sector to benefit customers outside of domestic manufacturing.