We will assist you with precise and stable deposition.
Based on the latest technology for crystal film thickness monitoring, we perform monitoring and control of the rate and film thickness, as well as control of the deposition sequence. Precise and stable deposition is possible with high-resolution and high-speed measurements. The design excels in scalability and versatility, making it suitable for various applications.
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basic information
- Multi-sensor functionality / Standard simultaneous measurement with 2 sensors is possible, and it can be expanded up to 8 sensors. Multiple sensors can be used as backups for automatic switching during crystal lifetime or for averaging rate measurements from multiple positions for rate/thickness control. - Programming for a wide variety of multilayer films is possible / Up to 98 types of film programs can be defined, allowing for programming of multilayer film sequences with up to 99 steps through their combinations. Additionally, this recipe can be stored for up to 9 instances, accommodating any multilayer film deposition sequence. - Control of multiple evaporation sources / Standard control of 2 channels (switchable) of evaporation sources is available, with the option to expand up to 8 channels. - Abundant I/O and customizable options / I/O can be expanded up to 32. Programming of I/O and internal operations can be easily done via the touch panel. The front panel includes 4 programmable buttons and LED lamps, which can be freely customized. - A variety of sensors are available / Bakeable/non-bakeable, sensors with shutters, dual sensors, and 6-channel sensors, among others.
Price range
P4
Delivery Time
Applications/Examples of results
Vacuum deposition device, etc.
Line up（2）
| Model number | overview |
|---|---|
| Model 851 Film Thickness Monitor | |
| Model 861 Film Thickness Controller |
Company information
VISTA Corporation is a specialized vacuum technology company that develops, manufactures, sells, and provides consulting and technical contracting for vacuum gauges, vacuum pumps, and other products suitable for ultra-high vacuum and extreme vacuum, backed by staff with many years of experience in vacuum technology and the vacuum market. If you are not satisfied with commercially available vacuum products, please feel free to consult with us.