It offers superior cost performance compared to conventional MHR.
The MCR3000C series, compatible with 300mm for super clean rooms, is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with all-axis AC servo, offering superior cost performance compared to conventional MHR models. You can choose between base type and flange type to match your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
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basic information
【Features】 ○ Arm variations: 160mm, 200mm ○ Z-axis variations: 300mm, 350mm, 500mm ○ Load capacity: 4kgf or less based on the third joint of the arm ○ Cleanroom compatible: Equipped with a 0.1μm mesh filter for vacuum lines ○ Base type and flange type can be selected according to the equipment layout ○ Equipped with operation monitor ○ Control method: RS232C and parallel photo I/O ○ All axes use AC servo motors ○ High-speed, high-precision wafer transport through S-curve acceleration and deceleration control ○ Wafer holding: Vacuum suction, drop-in, edge grip chuck ○ Chuck materials can be various, including CFRP, aluminum, ceramics, etc. ○ Can accommodate optimal chucks tailored to the transported items and equipment layout ● For more details, please contact us or refer to the catalog.
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