For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.
The LHR3000 series clean robot with a 3-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
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basic information
【Features】 ○ Arm variations: 400mm, 500mm, 700mm ○ Z-axis variations: 400mm, 500mm, 600mm, 760mm, 900mm, 1500mm ○ Load capacity: 15kgf or less at the third joint (400mm, 500mm) ○ 40kgf or less at the third joint (700mm) ○ Cleanroom compatible: Equipped with a 0.1μm mesh filter for vacuum lines ○ Base type and flange type can be selected according to equipment layout ○ Equipped with operation monitor ○ Control method: RS232C and parallel photo I/O ○ All axes use AC servo motors ○ High-speed, high-precision transport of glass substrates through S-curve acceleration and deceleration control ○ Chuck materials can accommodate various options such as CFRP, aluminum, ceramics, etc. ○ Various sensors can be mounted on the chuck → Alignment, presence/absence, mapping, etc. ○ Can accommodate optimal chucks tailored to the transported items and equipment layout ● For more details, please contact us or refer to the catalog.
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