Specifications of AC servo motors and high-speed transportation through motion trajectory optimization.
The GCR4000-AM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport in semiconductor manufacturing equipment and inspection devices that accommodate 300mm. You can choose between base type and flange type according to the equipment layout. It is possible to use optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
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basic information
【Features】 ○ Arm variation: 210mm ○ Capable of handling 2 FOUPs with the robot alone ○ Z-axis variation: 300mm ○ Load capacity: 4kgf or less based on the third joint of the arm ○ Base type and flange type can be selected according to the equipment layout ○ Equipped with operation monitor ○ Control method: RS232C and parallel photo I/O ○ All axes use AC servo motors ○ High-speed and high-precision wafer transport through S-curve acceleration and deceleration control ○ High-speed transport achieved through AC servo motor specifications and optimization of operation trajectory ○ Wafer holding: vacuum suction, drop-in, edge grip chuck ○ Chuck materials can accommodate various options such as CFRP, aluminum, ceramics, etc. ○ Can be adapted with optimal chucks according to the transported items and equipment layout ● For more details, please contact us or refer to the catalog.
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