The motor can be equipped with a reduction gear! The controller is a 5-axis specification clean robot.
The "HR1400-720" is a linear single-arm clean robot equipped with an AC servo motor of the absolute encoder type for all axes. The motor can be equipped with a reduction gear. Control methods can be selected from RS232C, I/O, and Ethernet. 【Features】 ■ Equipped with various sensors ■ Controller is 5-axis specification ■ Control method: RS232C ■ I/O and Ethernet can be selected ■ Equipped with an AC servo motor of the absolute encoder type for all axes *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■ Arm - Operating range: 1430mm - Transport speed: 1430mm/2.0sec or less - Resolution: 0.005mm or less ■ Rotation - Operating range: 300 degrees - Transport speed: 180 degrees/1.5sec or less - Resolution: 0.0005 degrees or less ■ Up and Down - Operating range: 720mm - Transport speed: 720mm/2.5sec or less - Resolution: 0.001mm or less ■ Transported item: Glass substrate (without film) ■ Repetition accuracy: ±0.2mm or less ■ Cleanliness: 0.3μm/cf Class 10 *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Usage】 ■ FPD field *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."
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