While it is a single arm, it maintains the functionality of a twin arm.
The GTCR5000 series is a 5-axis horizontal multi-joint clean robot compatible with 300mm, which ensures the functionality of a twin arm while being a single arm by incorporating a twin chuck. It is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices that accommodate 300mm. Depending on the equipment layout, you can choose between a base type and a flange type. It is possible to accommodate with optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
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**Features** - Arm variations: 210mm, 280mm - Capable of handling 2 FOUPs (210mm) and 3 FOUPs (280mm) with the robot alone - Z-axis variation: 300mm - Load capacity: 4kgf or less based on the third joint of the arm - Adoption of inch chuck reduces wafer exchange time - Single chuck specification also available - Base type and flange type can be selected according to the equipment layout - Equipped with operation monitor - Control method: RS232C and parallel photo I/O - All axes use AC servo motors - High-speed and high-precision wafer transport through S-curve acceleration/deceleration control and trajectory optimization - Wafer holding: vacuum suction, drop-in, edge grip chuck - Chuck materials can be various, including CFRP, aluminum, ceramics, etc. - Can accommodate optimal chucks tailored to the transported items and equipment layout For more details, please contact us or refer to the catalog.
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