Suitable for small wafer transport, allowing for a compact device layout.
The SSCR3115S series of 3-axis cylindrical coordinate clean robots for super clean rooms is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. It is compatible with the SSCR2090S-PM and can be modified to have a link arm specification or a Z-axis-less specification. For more details, please contact us or refer to the catalog.
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basic information
【Features】 ○ The SSCR2090S-PM is compatible with units and can be modified to link arm specifications or Z-less specifications. ○ Load capacity: 0.2 kgf or less (workpiece only) when converted to the third joint of the arm. ○ Equipped with operation monitoring. ○ Control method: RS232C and parallel photo I/O. ○ All axes use 2-phase stepping motors. ○ High-speed and high-precision transport of wafers is achieved through S-curve acceleration and deceleration control. ○ Wafer holding: vacuum suction. ○ Chuck materials can be customized to various options including CFRP, aluminum, and ceramics. ○ Can accommodate optimal chucks tailored to the transported items and equipment layout. ● For more details, please contact us or refer to the catalog.
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◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
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