Ideal for transporting wafers and other items within semiconductor manufacturing equipment compatible with 300mm and 450mm.
The multi-axis type for super clean rooms, the 4-axis horizontal articulated clean robot GCR4280-AM series, is suitable for transporting wafers, small glass substrates, and other items within semiconductor manufacturing equipment and inspection devices, compatible with 300mm and 450mm sizes. You can choose between base type and flange type according to the equipment layout. It is possible to accommodate optimal chucks tailored to the items being transported and the equipment layout. For more details, please contact us or refer to the catalog.
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**Features** - Arm variation: 280mm - Capable of handling 3 FOUPs with the robot alone (300mm wafer) - Z-axis variation: 300mm, 420mm - Load capacity: 4kgf or less based on the third joint of the arm - Cleanroom compatible: Equipped with a 0.1μm mesh filter in the vacuum line - Base type and flange type can be selected according to the equipment layout - Double chuck specifications can also be selected - Equipped with operation monitor - Control method: RS232C and parallel photo I/O - All axes use AC servo motors - High-speed, high-precision wafer transport through S-curve acceleration and deceleration control - Wafer holding: Vacuum suction, drop-in, edge grip chuck - Chuck materials can be various, including CFRP, aluminum, ceramics, etc. - Can accommodate optimal chucks tailored to the transported items and equipment layout For more details, please contact us or refer to the catalog.
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