It can be used for transporting wafers inside a vacuum chamber.
The vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series can be used for transporting wafers within a vacuum chamber. Compared to the SVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the SVHR for installation, allowing for a smooth transition. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
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basic information
【Features】 ○ Arm variations: 160mm, 190mm, 260mm ○ Z-axis variations: 20mm, 40mm ○ Load capacity: 2kgf or less at the third joint (arm length 160mm, 260mm) ○ 3kgf or less at the third joint (arm length 190mm) ○ Magnetic fluid seal equipped at the arm joint ○ Vacuum seal: uses magnetic fluid seal and bellows ○ Cleanroom compatible: equipped with a 5μm mesh filter for exhaust within the arm ○ Operating monitor equipped ○ Control method: RS232C and parallel photo I/O ○ All axes use 2-phase pulse motors ○ High-speed, high-precision transport of wafers through S-curve acceleration and deceleration control ○ Servo motor specifications can also be selected as motor specifications ○ Chuck materials can be various, including CFRP, aluminum, ceramics, etc. ○ Wafer holding: drop-in, edge grip chuck ○ Can accommodate optimal chucks according to the transported objects and equipment layout ● For more details, please contact us or refer to the catalog.
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