It is possible to position the susceptor at high speed and high precision using a gripping method in a vacuum environment.
The 342mm Susceptor-Compatible Vacuum Aligner SVAL30D1 series enables high-speed and high-precision positioning of susceptors (such as compound semiconductors and silicon wafers) in a vacuum environment using a gripping method. By placing the positioning sensor in the vacuum environment, installation can be completed with just the main unit, increasing the design flexibility of the equipment. For more details, please contact us or refer to the catalog.
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【Features】 ○ Alignment possible for work (tray) weights up to 4kg ○ Equipped with a 2-axis magnetic fluid field-through and welded bellows ○ Equipped with a vacuum-resistant reflective fiber sensor → Can be installed as a standalone aligner → Increases design flexibility of the chamber ○ Tray contact material is PEEK, O-ring (Viton) ○ Supports customization of tray contact materials and shapes ○ Can rotate to any angle according to the wafer arrangement in the tray 【Specifications】 ○ Transported item: φ342mm tray with notch specification, weight under 5kg ○ Positioning accuracy: Centering: within ±0.3mm, Notch locate: within ±0.3 degrees ○ Positioning time: Notch search within 4 seconds (without re-gripping operation) ○ Sensor: Vacuum-resistant reflective fiber sensor ○ Vacuum level: 1.33x10^-6Pa ○ Drive method: 2-phase pulse motor with encoder ○ Utility: Power supply: DC24V 7A ● For more details, please contact us or refer to the catalog.
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