The control method is RS232C and parallel photo I/O.
The SAL4484 series optical aligner, compatible with 100mm to 200mm, is designed for positioning wafers in semiconductor manufacturing equipment and inspection devices that require precise alignment during transport. It centers silicon wafers and positions the orientation flat and notch quickly and accurately. The control method uses RS232C and parallel photo I/O. For more details, please contact us or refer to the catalog.
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basic information
【Specifications】 ○Transported Item: SEMI standard 100–200mm silicon wafers ○Positioning Time: Centering: 3 seconds ○Positioning Accuracy: →Centering: within ±0.1mm →Orifla (notch) locate: within ±0.1° ○Sensor: Visible light semiconductor laser sensor ○Size Switching: Switching via command control or communication ○Cleanliness: 0.1μm/cf Class 1 (during exhaust of drive unit) ○Drive Method: 2-phase stepping motor, 4 axes used, with built-in motor driver and controller ○Power/Vacuum: DC24V±10%, 3A/-53kPa or more ●For more details, please contact us or refer to the catalog.
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