Using a 2-phase stepping motor! Compatible with 5, 6, and 8-inch silicon wafer aligners.
The AA2568 is an aligner compatible with 5, 6, and 8-inch wafers. Wafer centering is achieved by clamping the wafer's outer circumference with a polyacetal resin clamp. It allows for suction via a spindle and positioning using a light sensor. It uses a 2-phase stepping motor. 【Features】 ■ Wafer centering: Clamping the wafer's outer circumference with a polyacetal resin clamp ■ Notch positioning: Suction via spindle and positioning using a light sensor ■ Compact and clean body for improved cleanliness ■ RS232C communication control or I/O control *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Specifications】 ■Transported items: 5, 6, 8 inch silicon wafers ■Positioning accuracy ・Centering: within ±0.1mm ・Notch: within ±0.15 degrees ■Positioning time: within 6 seconds ■Cleanliness: ISO Class 2 ■Supply sources ・Power supply: DC24V 3A or more ・Compressed air: 0.5MPa ・Vacuum: 10L/min -53kPa or more *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■LED/MEMS/Power Device Fields *For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."
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