For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.
The LHR3000 series clean robot with a 3-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
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basic information
【Features】 ○ Arm variations: 400mm, 500mm, 700mm ○ Z-axis variations: 400mm, 500mm, 600mm, 760mm, 900mm, 1500mm ○ Load capacity: 15kgf or less at the third joint (400mm, 500mm) ○ 40kgf or less at the third joint (700mm) ○ Cleanroom compatible: Equipped with a 0.1μm mesh filter for vacuum lines ○ Base type and flange type can be selected according to equipment layout ○ Equipped with operation monitor ○ Control method: RS232C and parallel photo I/O ○ All axes use AC servo motors ○ High-speed, high-precision transport of glass substrates through S-curve acceleration and deceleration control ○ Chuck materials can accommodate various options such as CFRP, aluminum, ceramics, etc. ○ Various sensors can be mounted on the chuck → Alignment, presence/absence, mapping, etc. ○ Can accommodate optimal chucks tailored to the transported items and equipment layout ● For more details, please contact us or refer to the catalog.
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◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
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