The S-shaped acceleration and deceleration control enables high-speed and high-precision transport of glass substrates.
The LVHR3000 series vacuum-compatible clean robot with a 3-axis cylindrical coordinate system, designed for glass substrates, is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. It transports glass substrates at high speed and high precision through S-curve acceleration and deceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
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basic information
【Features】 ○ Arm variations: 330mm, 440mm, 500mm, 550mm ○ Z-axis variations: 20mm, 32mm, 40mm, 60mm ○ Load capacity: 10kgf or less at the third joint ○ Magnetic fluid seal equipped at the arm joint ○ Vacuum seal: uses magnetic fluid seal and bellows ○ Cleanroom compatible: equipped with a 5μm mesh filter for arm exhaust ○ Operation monitor equipped ○ Control method: RS232C and parallel photo I/O ○ All axes use AC servo motors ○ High-speed, high-precision transport of glass substrates through S-curve acceleration and deceleration control ○ Chuck materials can accommodate various options such as CFRP, aluminum, ceramics, etc. ○ Can provide optimal chucking according to the transported object and equipment layout ● For more details, please contact us or refer to the catalog.
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◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."