Desktop loader system compatible with wafers such as glass, sapphire, SiC, GaN, etc.
A compact tabletop system that integrates the wafer inspection stage and the transport section. It features a long-stroke design with an X-axis of 190mm and a Y-axis of 200mm, allowing for wafer rotation operations at any position using a knob at hand. The transport robot has two chucks and can complete the wafer exchange operation to the inspection stage in a short time. The combination of the robot and the drop-in alignment stage achieves a low-cost, space-saving, and high-functionality system.
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basic information
○Transported items: ~100mm wafers (glass, sapphire, SiC, GaN, etc.) ○Operating range: Workpiece center reach distance: 225mm, Rotation angle (θ-axis): 360 degrees, Vertical stroke (Z-axis): 150mm ○Transport speed (average speed): Arm (R-axis): 225mm/sec, Rotation angle (θ-axis): 500 degrees/sec, Vertical stroke (Z-axis): 200mm/sec ○Transport speed (maximum speed): Arm (R-axis): 300mm/sec, Rotation angle (θ-axis): 700 degrees/sec, Vertical stroke (Z-axis): 300mm/sec ○Wafer holding method: Holding by vacuum suction ○Repeatability: Within ±0.1mm ○Cleanliness: ISO Class 2 or lower (during exhaust of drive parts) ○Mass: Robot body approximately 15kg ○Utility: Power supply voltage: DC24V±10%, Vacuum: -53kPa or higher
Price range
Delivery Time
Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
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