3-axis cylindrical coordinate clean robot
This is the SWCR series of waterproof 3-axis cylindrical coordinate robots (compatible with 300mm wafers, featuring inversion and edge grip functions). It can transport wafers in environments where water is present or where wafers are wet. It is capable of wafer transport in environments where humans cannot enter and touch the wafers due to the presence of chemical liquids. It has an IP64 protection rating and is suitable for wafer transport in acidic and alkaline atmospheres during the LSI manufacturing process. The arm section ensures corrosion resistance through Teflon coating. The arm joint section uses a V-seal for waterproofing. The joints of the components are sealed with a Viton gasket. The Z-axis section employs a bellows for waterproofing. It is equipped with an operation monitor. Control method: RS232C and parallel photo I/O. All axes use 2-phase stepping motors. Wafer transport is performed at high speed and high precision through S-curve acceleration and deceleration control. Wafer holding methods include vacuum suction, drop-in, and edge grip chuck. It can accommodate optimal chucks tailored to the transported objects and equipment layout.
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basic information
Robot Specifications Transported Object: Up to 300mm wafer Mechanical Structure Type: Cylindrical Coordinate Type Control Axes: 3 Axes Motor Type: 2-Phase Pulse Motor Operating Range*: Arm 3rd Joint Center Swing Angle (θ Axis): 340 degrees Vertical Stroke (Z Axis): 312mm Transport Speed (Average)*: Arm (R Axis): 250mm/sec Swing Angle (θ Axis): 120 degrees/sec Vertical Stroke (Z Axis): 70mm/sec Transport Speed (Maximum)*: Arm (R Axis): 500mm/sec Swing Angle (θ Axis): 160 degrees/sec Vertical Stroke (Z Axis): 85mm/sec Resolution*: Arm (R Axis): Below 49µm Swing Angle (θ Axis): 0.0214 degrees Vertical Stroke (Z Axis): Below 12.5µm Transport Level*: 255mm (from flange mounting surface to chuck mounting surface) Repeatability: Within ±0.2mm Utility: Current Voltage: DC24V 8A Positive Pressure: 0.1MPa
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Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
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