[Vacuum Compatible] High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.
This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It features a built-in linear scale developed in-house, allowing for a slim and lightweight design, as well as high-precision repeat positioning performance through full closed-loop control, possessing characteristics equivalent to those for atmospheric use.
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basic information
- Achieves a thin and lightweight design while incorporating a 5-phase stepping motor, coupling, ball screw, and linear scale. - High-precision repeat positioning is possible with full closed-loop control. - Table size: 120mm x 120mm - Table movement: 50mm - Compatible vacuum level: 10^-4 Pa - Minimum resolution: 1nm - Maximum movement speed: 2mm/sec - Compatible controller: FC-911 □ For more details, please refer to the catalog or contact us. □
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Applications/Examples of results
Since our founding, we have primarily manufactured and provided vacuum-compatible stages on a custom basis. For over 10 years, they have been used for various applications (e.g., for scanning electron microscopes). We are pleased to announce that we will now offer vacuum-compatible stages as standard products. They have been available since the 2013 fiscal year. We will continue to provide standard products while also accommodating custom orders.
catalog（1）
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CAD data（1）
| Model number | overview | File |
|---|---|---|
| DWG-DXF_FS-1050UPX(V) | This is a complete set of drawings for the vacuum-compatible 1nm resolution stage FS-1050UPX(V). We have 2D files available in "DXF" and "DWG" formats. |
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.