Long stage with built-in linear encoder capable of 10nm resolution, usable in a vacuum.
This is a vacuum-compatible feedback stage equipped with outgassing countermeasures. It can be directly introduced into a vacuum chamber. It has a built-in optical linear encoder, and based on the position information detected by the encoder, it performs full closed-loop control, providing high-precision repeat positioning performance. With a movement range of 100mm, it allows for sample movement and precise positioning with a single unit, making it effective when a wide range of data (such as spectra) is required.
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basic information
- Achieves a thin and lightweight design while incorporating a 5-phase stepping motor, coupling, ball screw, and linear encoder. - High-precision repeat positioning is possible with full closed-loop control. - Table size: 120mm x 120mm - Table travel distance: 100mm - Repeat positioning accuracy: ±20nm - Compatible vacuum level: 10^-4Pa - Minimum resolution: 10nm - Maximum movement speed: 2mm/sec - Compatible controller: FC-511
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Applications/Examples of results
Scanning Electron Microscope X-ray Utilization Technology Ultrafine Processing It is used in inspection devices and experimental equipment that require precise positioning and reproducibility.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
