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  6. Vacuum-compatible 10nm feedback stage, micro-rotation type

Vacuum-compatible 10nm feedback stage, micro-rotation type

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FS-1120Pθ(V)

last updated:Jun 03, 2019

シグマ光機
シグマ光機
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Micro-rotation stage with an encoder that operates with a minimum resolution of 0.00001° and ±4° in vacuum conditions.

This is a high-resolution micro-rotation stage equipped with an optical linear encoder. It has a resolution of 0.00001° and a stroke of ±4°. It has been treated for outgassing and can be used in a vacuum. It is suitable for adjusting the rotation direction.

    Other FA equipment
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Vacuum-compatible 10nm feedback stage, micro-rotation type

  • Related Link - https://www.global-optosigma.com/jp/

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basic information

○ High-precision repetitive positioning is possible with full closed-loop control ○ Table size: 120mm × 120mm ○ Table movement range: ±4° ○ Repetitive positioning accuracy: ±0.00002° ○ Compatible vacuum level: 10^-4 Pa ○ Minimum resolution: 0.00001° ○ Maximum movement speed: 1°/sec ○ Compatible controller: FC-511 ■ For details, please request documentation or download the catalog ■

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Applications/Examples of results

The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.

catalog(3)

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Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

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Precision Positioning Stage 'Q&A You Should Know When Selecting'

Precision Positioning Stage 'Q&A You Should Know When Selecting'

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Vacuum-Compatible 10nm Feedback Stage System Catalog

Vacuum-Compatible 10nm Feedback Stage System Catalog

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Company information

シグマ光機

シグマ光機

Testing, Analysis and Measurement

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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.

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