For selecting piezo stages! Maximum resolution of 1nm and excellent responsiveness! Application examples are also included.
This is a piezo stage with ultra-high resolution and fast response, featuring a maximum resolution of 1nm. It enables highly reliable positioning through feedback control using an integrated displacement sensor. 【Usage Examples】 ■ Semiconductor and LCD inspection equipment, interferometer devices, analytical instruments, microscope lens focusing, ultra-precision machining, laser-related equipment, nanometer positioning, etc. 【Reasons for Choosing This Product】 ■ Customization available from a single unit ■ Compatible with vacuum and non-magnetic requirements ■ Combination unit support A wide range of products and numerous application examples are available! For more details, please download the catalog or contact us.
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basic information
【Published Products】 ○ Basic Type PS → Ideal for a wide range of applications with a rich lineup ○ Open Type PK → Best suited for combination with microscopes and light-transmitting devices ○ Objective Lens Type PF → Optimal for focusing objective lenses ○ Tilt and Rotate Type PT → Ideal for alignment and surface matching ○ Precision Machining Type PU → Best for nano and micro machining in ultra-precision cutting ○ Controller NC → Driven by closed-loop control using displacement sensors ○ Driver PH → Driven by open-loop control with applied voltage ● For more details, please contact us or refer to the catalog.
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Ultra-precise positioning on the nanometer order can only be achieved when the piezoelectric actuator, mechanical mechanism, and control, which serve as the driving source, are matched within the system. Our company will modularize these fundamental elements and provide them as user-friendly products.