It is a ultra-high vacuum pump based on non-evaporable getter (NEG) technology.
The Getter Pump "Insi Torr Fast Pump" is an ultra-high vacuum pump based on the non-evaporative getter NEG technology developed by the Saes Group. This pump was developed for Applied Materials' PVD and aluminum sputtering processes. The development of this pump significantly reduces the time it takes for the chamber to vent and return to operation. 【Features】 - By installing the in-situ fast pump inside the chamber, downtime is reduced from 11 hours to 7 hours. - Can be retrofitted to existing equipment. - Enhances upgrading without affecting the footprint. - Does not negatively impact particle characteristics or film properties. For more details, please contact us or download the catalog.
Inquire About This Product
basic information
【Features】 ○ Consists of two rows of getter disks made of non-evaporative getter material and an infrared lamp positioned in the center. ○ The pump is activated by the radiant heat from the lamp, and the chamber is baked. ○ The getter material reacts chemically with active gases in the vacuum and captures them on its surface. ○ While the pump-down and process are taking place, it reacts with H2, H2O, CO, CO2, N2, and O2. ○ The presence of argon during the process does not affect the performance of the pump. ○ The two rows of getter disks are mounted on a stainless steel shielding plate. ○ The pump is equipped with two K-type thermocouples and wires for connection to an external power source. ● For more details, please contact us or download the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
For more details, please contact us or download the catalog.
catalog（1）
Download All Catalogs
Company information
We import and sell products from Saes Pure Gas, a company of the Saes Getters Group, a global pioneer in getter technology, focusing on ultra-high purity gas purification systems and point-of-use gas filters, as well as materials related to organic EL materials and getters. Our technical sales team, equipped with specialized knowledge, responds meticulously to client needs, including customization for production lines and support for testing and research, as well as small lot orders.
