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  6. Ion pump fusion type ultra-high vacuum getter pump "NexTorr"

Ion pump fusion type ultra-high vacuum getter pump "NexTorr"

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last updated:May 27, 2026

サエス・ゲッターズ・エス・ピー・エー 日本支店
サエス・ゲッターズ・エス・ピー・エー 日本支店
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Ultra-lightweight UHV-compatible getter pump for efficiently exhausting all gases.

The NEXTorr pump features a design that combines the technologies of NEG and ion pumps in a complementary manner. While a small sputter ion pump (SIP) removes inert gases that were not evacuated by the NEG, the getter cartridge serves as the primary UHV pump. Due to the large pumping capacity of the NEG pump for active gases (such as water, hydrogen, nitrogen, etc.) and its integrated design, the NexTorr pump is 10 to 50 times smaller and lighter compared to ion pumps with similar pumping speeds. **Features** - High pumping speed and capacity for all active gases - Pumping speed for inert gases and methane - Constant pumping speed in UHV-XHV - Requires minimal power during operation - Extremely compact and lightweight pump - Reduces interference with magnetic fields - Oil-free and vibration-free - Capable of measuring pressures below 10^-9 mbar

    Vacuum pump
NexTorr.jpg

Ion pump fusion type ultra-high vacuum getter pump "NexTorr"

NexTorr.jpg
NexTorr.jpg
  • Related Link - https://www.saesgetters.com/jp/products-functions/…

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basic information

【Standard Specifications】 ○ Usable flange sizes: ICF70/114/152 (depending on product grade) ○ Weight: 2.2/3.1/6.5 kg (depending on product grade) ○ Dimensions (atmospheric side ion pump): 75x75x106/75x75x120 mm (depending on product grade) ○ Pumping speed (for hydrogen): 100/200/300/500/1000/2000 L/s (depending on product grade) ○ Dedicated power supply available

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Applications/Examples of results

【Examples of Use】 ● Particle accelerator ● UHV-XHV experimental equipment ● Portable transport device ● SEM, TEM, FIB and various other analytical instruments

Company information

サエス・ゲッターズ・エス・ピー・エー

サエス・ゲッターズ・エス・ピー・エー 日本支店

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The "Saes Getters Group," a global pioneer in getter technology, has been providing solutions for various applications, such as high and ultra-high vacuum environments and the deposition of pure metals, since its founding in the 1940s (including gas/moisture adsorbents, mercury/alkali metal deposition sources, etc.). Additionally, the company has actively invested in research and development, and since 2004, it has expanded its business into the Nitinol market. The superelastic properties of Nitinol are applied in medical devices, while its shape memory characteristics are utilized in industrial and household electrical appliances.

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