Plasma Cleaner V1000/1000X/1000XS
Plasma cleaner with 13.56MHz high-frequency power applied 【Features】 ○ Equipped with both RIE and DP modes ○ Adopts a two-stage electrode system, improving processing efficiency (V1000X) ○ Special electrode structure can be modified to enhance plasma efficiency ○ High-precision matching unit and RF power supply with high reliability ● For other functions and details, please contact us.
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basic information
Plasma cleaner with 13.56MHz high-frequency power applied 【Features】 ○ Equipped with both RIE and DP modes ○ Adopts a two-stage electrode system, improving processing efficiency (V1000X) ○ Can be modified to a special electrode structure to enhance plasma efficiency ○ High-precision matching unit and RF power supply with high reliability ● For other functions and details, please contact us.
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Applications/Examples of results
【Applications】 ○ Ashing and etching of silicon wafers ○ Desmearing of substrates ○ IC assembly, BGA/CSP substrate processing ○ Dry cleaning of electronic materials related to electronics components ○ Removal of natural oxide films and organic substances ○ Surfactant treatment ○ Removal of surface contaminants
Company information
The Yamato Scientific Group's management philosophy is to "support the innovation of research and development and production technology, contributing to the advancement and development of science and technology that brings happiness to humanity." Under this philosophy, we have been working to establish the trusted "Yamato brand" through our business activities. As members of the Yamato Scientific Group, our executives and employees take pride in and responsibility for the trusted "Yamato brand" that we have cultivated since our founding in 1889. We are committed to supporting cutting-edge research and development and innovation in production technology at various companies and public and private research institutions and universities in our country, which advocates for the creation of a science and technology-oriented nation. We recognize our social responsibilities and public mission, and by practicing actions based on this "Corporate Code of Conduct," we aim to gain further trust and evaluation from our customers.
