Batch equipment can simultaneously deposit films on multiple cassettes, enabling large 3D substrate film deposition.
High Tech Systems is the sales agent for Veeco/CNT, a global leading company in Atomic Layer Deposition (ALD) equipment. Veeco/CNT is the ALD division of the U.S. company Veeco, which develops cutting-edge ALD technology and is the manufacturer of the most widely used development and pilot production ALD equipment in research institutions, universities, and companies worldwide. They also have a proven track record in the market for production ALD equipment and large-area substrate ALD equipment, and they respond to customer requests.
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High-Tech Systems supports the introduction of products and technologies from Veeco/CNT, a global leading company in ALD atomic layer deposition equipment! ● Batch equipment allows simultaneous film deposition of multiple cassettes, enabling large 3D substrate deposition (100mm to 200mm wafers: 100 pieces/batch, 300mm wafers: 12 pieces, 2.5 generation square substrates: 5 pieces) ● Processes high-precision, uniform films with short cycle times Please feel free to contact us for more details about this ALD equipment.
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Applications/Examples of results
ALD technology contributes to a wide range of fields such as semiconductors, flat panel displays (FPD), MEMS, lighting, and medical applications by forming thin films with excellent protective characteristics and no defects.
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