PVD equipment equipped with a double ring magnetron DRM400.
Scia Systems GmbH was established by key staff who developed the software and hard wafers for the IonScan device, an ion beam trimming (trimming processing, IBF) equipment from Roth&Rau AG and MicroSystems GmbH. Scia Systems develops unique and proprietary cutting-edge ion beam and plasma technologies, handling equipment from research and development to mass production.
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●Features This is a PVD device equipped with a Fraunhofer FEP manufactured DRM400 unit that allows for the selection of unipolar and bipolar modes using DC pulses, as well as a substrate rotation mechanism, cooling mechanism, and RF bias mechanism, providing excellent film thickness uniformity and the capability for ultra-fast film deposition. ●Applications We propose a PVD device that is optimal for fields such as SAW filters (SiO2 films), piezoelectric films (AlN films), optical systems (Si3N4, SiO2, HfO2, Ta2O5, Al2O3), and electronic components (Si3N4, SiO2, AlN films, ferroelectric films), among others. Please feel free to contact us for more details about this device.
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Scia Systems GmbH was established by key staff who developed the software and hard wafers for the IonScan device, an ion beam trimming (trimming process, IBF) equipment from Roth&Rau AG and MicroSystems GmbH. Scia Systems develops unique and proprietary cutting-edge ion beam and plasma technologies, handling both research and development equipment as well as mass production equipment.
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Our company website features information on used equipment related to FPD and semiconductors. ● Main Business Activities Purchase of used semiconductor manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for semiconductor manufacturing lines Purchase of used FPD manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for FPD manufacturing lines Contract development, manufacturing, and sales of semiconductor manufacturing equipment and FPD manufacturing equipment Sales of various equipment parts Agency sales of overseas manufactured equipment