Excellent reliability, high performance and high quality, a diverse and abundant lineup of models.
The CRYO-U series cryopumps have been newly developed for use in fields such as superconductivity, medical devices, measuring instruments, and cryogenic containers, based on ULVAC Cryo's vacuum technology and CTI's refrigeration technology from the United States. They offer excellent reliability, high performance, and high quality, with a diverse lineup of models. Additionally, a variety of options are available, including band heaters, noise-resistant cryogenic thermometers, and automatic regeneration devices, to shorten regeneration time. 【Features】 - Achieves a clean vacuum that cannot be obtained with other pumps - Capable of exhausting all gases - Can be used at low running costs as liquid nitrogen is not required - Compact design and lightweight - Easy to operate For more details, please contact us or download the catalog.
Inquire About This Product
basic information
【Lineup】 ○CRYO-U4H/U6H/U8H/U10H/U12H ○CRYO-U16H/U16P/U20H/U20P ○CRYO-U22H/U22P/U22WB/U30H ○L-type: CRYO-U8HL/U10HL/U12HL [Compressor Units] ○C10/C10AT/C15R/C40R ○C30VR/C30MVR/C30PVRT/C30PMVRT [Cryo Multi-System] ○CRYO-U6H・3/U8H・3/U10H・2/U8H・4 [Cryo Pumps for Sputtering Process] ○CRYO-U8HSP/U1HSP/U12HSP [Super Trap] ○Super Trap Series ○Speed TS Series [Ultra-Low Temperature Refrigerators] ○4K Refrigerator ○GM Refrigerator [Options] ○Regeneration Control Unit ARC Type ○Regeneration Gas Piping Unit PR Type ○Regeneration Band Heater PBH Type ○Cryo Thermocouple Thermometer MBS-C ○Cryometer MBD Type [Special Cryo Pumps] ○Rapid Room Temperature Regeneration, etc. ●For more details, please contact us or download the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
【Applications】 ○ Vacuum deposition equipment ○ Sputtering equipment ○ Ion implantation equipment ○ Semiconductor processing equipment ○ Accelerators ○ Nuclear fusion devices ○ Surface analysis equipment ○ Space chambers ○ Other equipment requiring clean high vacuum or ultra-high vacuum ● For more details, please contact us or download the catalog.
catalog（1）
Download All Catalogs
Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC provides "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services for flat panel displays, electronic components, semiconductors, and general industrial equipment, by bringing together the unique technologies cultivated through years of research and development and production technology reform. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to become a top manufacturer in all cutting-edge fields.
![[Research Material] Global Market for Cryopumps](https://image.mono.ipros.com/public/product/image/8bc/2001463599/IPROS77303101024111672963.jpeg?w=280&h=280)
