It is a device that can introduce various gases with known flow rates into a vacuum container (joint research with the National Institute of Advanced Industrial Science and Technology).
- It is possible to introduce a known flow rate of almost any gas (including mixed gases) into a vacuum container, etc. - The flow rate is proportional to the upstream pressure. - It is easy to generate various flow rates (conductance is constant with respect to primary pressure). - There is little temperature dependence.
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basic information
The molecular flow controller is a device that can introduce various gases with known flow rates into a vacuum chamber using a standard conductance element (sold separately). The standard conductance element (SCE series) is a gas introduction component made of a porous sintered stainless steel body, and due to the very small diameter of the pores in the sintered body, the gas flow can meet molecular flow conditions even at relatively high primary pressures. This allows for the following characteristics to be utilized: - The ability to introduce known flow rates of almost any gas (including mixed gases) into vacuum chambers, etc. - Flow rate is proportional to upstream pressure. - Various flow rates can be easily generated (conductance remains constant with respect to primary pressure). - Low temperature dependence.
Price range
P5
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Applications/Examples of results
- Quantitative measurement using thermal desorption gas analysis (TDS: Thermal desorption spectroscopy) ⇒ Using the PMFC-100 series, various known gases (H2/H2O/CO/N2/CO2) were introduced to calibrate the mass spectrometer and perform quantitative evaluation. - Performance evaluation of cryopumps for ultra-high vacuum (management of generation and maintenance of ultra-high vacuum) ⇒ Using the PMFC-100 series, various known gases (H2/N2/Ar/CH4) were introduced into the vacuum chamber, and the exhaust speed was evaluated against the amount of gas. - Performance evaluation of barrier films for organic EL (performance degradation of organic EL due to oxidation caused by water vapor/oxygen) ⇒ For the mass spectrometer, quantitative evaluation was performed using quantitative calibration with water vapor passed through the PMFC-100 series.
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Company information
PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.