Inline Spray Coater for Three-Dimensional Structure Devices
We have developed an inline spray coater for electronic devices such as MEMS, SAW devices, power devices, and automotive electronics sensors. Our equipment incorporates the coating technology and know-how cultivated from prototyping to mass production, enabling optimal photoresist, protective films, and other functional film processing tailored to our customers' needs. *Please feel free to contact us for inquiries, questions, or consultations through the contact page on our company homepage below.
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basic information
【Features】 - Uniform coating on fine uneven three-dimensional shapes - Wide range of applications from 10nm to several hundred micrometers - High utilization efficiency of coating liquid (approximately tens of times that of conventional spin coating) - Good thin film coating on edge covers - Achieves high maintenance 【Specifications】 - 4-inch, 6-inch, and 8-inch wafer sizes (also compatible with other shapes) - Robot transportation method - Special spray method
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Applications/Examples of results
●MEMS ●SAW devices ●Accelerometer ●Magnetic head ●Quartz devices ●Pressure sensor ●Inkjet head ●Waveguide ●Thermal head ●Projector element ●Others
Company information
We contribute to the future with coating technology and special technologies. With a focus on technological innovation, we are currently collaborating with the National Institute of Advanced Industrial Science and Technology, Yokohama National University, Yamanashi University, Shinshu University, and the Kanagawa Industrial Technology Center. We are engaged in various research and development themes, including prototype development of special coatings for companies, process development, and consulting. Our proposals aim to achieve new functionalities, shorten research and development time, improve quality and functionality, and reduce development costs. We have received positive feedback by offering solutions along with surrounding technologies. If you have any research themes, development themes, or topics for consideration, we look forward to hearing from you.
